| 摘要 |
PURPOSE:To obtain an image extracting the feature of a sample under observation by modulating the scan position, diameter, or wavelength of a probe at a high speed, extracting an unmodulated image signal and a modulated image signal from a modulated signal detected from the sample under observation, and displaying a desired image based on them when scanning with the probe. CONSTITUTION:In Figure A, an electron beam probe is set to a focused state 1' shown in the figure on a sample 1 under observation by finely adjusting a current flowing through a focusing lens 3, and the electron beam probe is modulated into an unfocused state 2' shown in the figure based on a current fed to a focus modulating coil 11 from a high-speed waveform generator 13. The degree of the unfocused state 2' can be set to an optional size suitable to extract the desired feature of the sample 1 under observation by varying the current fed to the focus modulating coil 11. Secondary electrons emitted from the radiated area are detected by a scintillation detector 5 as a image signal corresponding to one picture element, for example, depending on the focused state 1' or unfocused state 2'. |
