FLUID CONTROL VALVE DEVICE

摘要

PURPOSE:To prevent generation of electromagnetic noise when a valve is opened and closed by providing an electric strain vibrator for vibrating an elastic member adapted to displace a valve body. CONSTITUTION:An electric strain vibrator 16 for vibrating an elastic member 15 is secured to one end of the elastic member 15 and fixed to a housing 17. The other end of the elastic member 15 is coupled to a valve body 13. One end of the elastic member 15 is excited by vibration of a minute displacement of the electric strain vibrator 15 in response to a signal of a control unit 8. The elastic member 15 is resonated and displaced largely because it is vibrated by a frequency including a natural frequency. The resonance state of an elastic member 15 can be controlled by varying a frequency of the electric strain vibrator 16 to continuously change the flow rate of a fluid.