| 摘要 |
PURPOSE:To reduce the number of jigs by constituting one wafer case by fitting an upper case and a lower case and using the lower case as a carrier jig as it is. CONSTITUTION:When a lower case 3 is covered with an upper case 2, the upper and lower cases are fitted by utilizing the elasticity of the quality of materials of the cases by the tapered angles of the upper and lower cases 2, 3, thus forming a wafer case 1. The lower case 3 consists of a semitransparent resin extending in a tapered manner toward an upper section such as polypropylene resin, lower case 3 itself is constituted as a carrier jig, and a wafer can be housed. A base section 9 in the lower case 3 is mounted detachably so that the wafer can be treated with a resist and washed as it is left as it is housed in the lower case 3 as the carrier jig. The number of jigs can be reduced because the lower case 3 can be treated with the resist and washed as the carrier jig as it is. |
