发明名称 FORMING METHOD OF MONOMOLECULAR LAMINATED FILM
摘要 PURPOSE:To prevent the mixing of an impurity while improving and equalizing molecular-axis orientation by forming a monomolecular film on the interface between a water layer and an organic solvent layer of two phase systems, an upper layer thereof consists of water and a lower layer thereof an organic solvent, which is heavier than water and does not mix with water. CONSTITUTION:An organic solvent 12, which is heavier than water and does not mix with water, is introduced up to the center of a frame 15 fitted in approximately half height of a water tank 11 in the lower section of the water tank. The frame 15 functions as the change of an area 16 surrounded by the frame. When pure water 13 is added slowly onto the organic solvent 12, the interface 14 between the organic solvent and water is formed. When a material for a monomolecular film is dropped to the interface 16 surrounded by the frame 15, molecules form in lines while hydrophilic groups are directed toward the water layer on the interface 14 between the organic solvent and water. When the area surrounded by the frame 15 is reduced gradually, intermolecular interaction is intensified, and a two-element solid film, which has high molecular orientation and into which impurities do not mix, is formed. A monomolecular laminated film is obtained by transferring the monomolecular film 17 to the surface of a clean substrate as the state of the solid film is kept as it is.
申请公布号 JPS60194517(A) 申请公布日期 1985.10.03
申请号 JP19840049337 申请日期 1984.03.16
申请人 CANON KK 发明人 MIZOTA ETSUKO;MATSUDA HIROSHI;TOMITA YOSHINORI
分类号 H01L51/05;B01J19/00;B05D1/20;H01L21/312;H01L21/368;H01L49/02;H01L51/40 主分类号 H01L51/05
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