| 摘要 |
PURPOSE:To analyze a sample having a large distortion range by obtaining a distortion line by separating specifically two moire patterns from a picture which has thinned out an input picture of a lattice-shaped model grid, in two directions, and two pictures which have varied a thinned-out phase of both the directions. CONSTITUTION:A lattice-shaped model grid drawn on a sample is brought to image pickup by a television camera 1 and stored by a picture processing device 4, read out by a personal computer 6 and brought to operation processing. In that case, the first thinned-out picture is formed by thinning out an input picture in two crossing directions, the second thinned-out picture is formed by varying a phase only in the first direction and thinning out said picture in two directions, and the third thinned-out picture is formed by varying the phase only in the second direction and thinning out the picture in two directions. Subsequently, the first moire pattern is separated by superposing the first and the second pictures, the second moire pattern is separated by superposing the first and the third pictures, and a distortion line of two-dimension, etc. is obtained from both the patterns. |
