| 摘要 |
PURPOSE:To improve the stability and reliability against temp. and the resolving power by reading the pattern of a permanent magnet thin film composed essentially of transition metal of rare earth and cobalt as the center by a Hall element. CONSTITUTION:An incremental rotary encoder is composed of a shaft 11, respective fixed and rotating disks 5, 6 made of glass and an outer case 7, etc. Sm-Co thin films 1, 2 in which the direction of easy magnetization against a base board can be made vertical and also parallel by the variation of atomic composition ratio are formed on the plate 6, said direction is formed in the films 1 and 2 vertically and parallelly to the plate 6 respectively. The vertical film is formed on the plate 5 at the place corresponding to the film 1 so that said film repels the film 1, and Hall element of Ga-As is put to the plate 5 to take out the output.
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