| 摘要 |
PURPOSE:To enable not only the easy continuous accumulation of monomolecular films and an improvement in the attaining rate of the accumulation by controlling the surface pressure of the monomolecular films so as to obtain desired surface density and interposing additionally a temp. control means into a liquid circulating system. CONSTITUTION:A circulating path 12 and a heat exchanger 31 are provided in a liquid tank 3 contg. a liquid for spreading of molecules for film forming. The temp. of the circulating water is controlled by, for example, passing the liquid having a desired temp. into the heat exchanger 31 while controlling the temp. with a temp. controller 32 via a temp. sensor 33 provided in the tank 3. As a result, the temp. of the water in the tank 3 is controlled with + or -0.5 deg.C accuracy in a 5-80 deg.C range. The easy control of the temp. conditions in the stage of accumulating the monomolecular films is thus made possible. As a result, not only the easy continuous accumulation of the monomolecular films but also the improvement in the temp. conditions, i.e., the improvement in the attaining rate of the accumulation in the stage of accumulation are thus made possible. |
