| 摘要 |
<p>PURPOSE:To attain high yield and high reliability by coupling a thin film nonlinear element obtained by successively laminating a metallic thin film, an insulating film and a metallic thin film with each picture element of one electrode and using a plastic film for one electrode substrate. CONSTITUTION:A metallic film 52 is formed on a plastic film substrate 51 and a prescribed pattern is obtained by photoetching. Then, an insulating body 54 is formed on the whole surface except a terminal part. In addition, a metallic film 56 to be also used as a picture element electrode is formed and a prescribed pattern is obtained by photoetching based upon a self-matching method using the film 52 as a mask. Since the number of using processes of plastic substrates can be reduced and the shape of element is simplified, so that high yield and high reliability can be obtained and the thickness of the display device can be thinned.</p> |
