| 摘要 |
PURPOSE:To produce an optical waveguide substrate simply and efficiently by forming a square pipe from smooth substrates, making material gas for glass formation flow into the pipe, heating the pipe to form an optical waveguide material layer, and then cutting off the pipe. CONSTITUTION:A reaction pipe 8 is formed by coupling four smooth substrates such as SiO2 as a square pipe and a dummy pipe 9 is connected to the reaction pipe 8. The glass formation material gas 6 such as SiCl4 is made to flow from one end of the pipe 9 into the reaction pipe 8 together with fuel, the reaction pipe 8 is heated by a burner 5 while being rotated to stack glass particles on the surface of the reaction pipe 8 and make the reaction pipe 8 transparent. The pipe is cut off to form an optical waveguide substrate. Since the reaction pipe 8 to be the substrate is directly heated, the glass fine particle layer is stably formed and the stacked thickness of the glass fine particle layer can be adjusted by the flow rate of the material gas 6, so that the optical waveguide substrate can be simply and efficiently produced. |
