发明名称 Negative-acting photoresist imaging system
摘要 A negative-acting photoresist imaging system is provided having a substrate, a metal layer, a latently sensitized, crosslinkable, negative-acting photoresist base layer, and a negative-acting photoresist layer. The system may further have an organic protective coat between the metal layer and the base layer, a matte top layer, and/or an antistatic layer on the back side of the substrate.
申请公布号 US4544622(A) 申请公布日期 1985.10.01
申请号 US19840632339 申请日期 1984.07.19
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 KAUSCH, WILLIAM L.
分类号 G03F7/095;(IPC1-7):G03C1/68;G03C1/70;G03C1/94 主分类号 G03F7/095
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