FLUID JET SEED PARTICLE GENERATOR FOR SILANE PYROLYSIS REACTOR

摘要

FLUID JET SEED PARTICLE GENERATOR FOR SILANE PYROLYSIS REACTOR Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane by means of a jet of gas which causes relatively larger particles of product silicon to impinge upon each other and become comminuted to a fine size and be transported upwardly into a fluidized bed as seed particles.