| 摘要 |
PURPOSE:To make the movement of an actuating rod controllable into three stages, by setting up each stopper in the outer circumferential part of a guided part, a second housing and the outer circumferential part of the actuating rod, respectively. CONSTITUTION:A stopper part 3c at the side of a pressure chamber A is set up in the outer circumferential part of a guided part 3a, while a stopper part 6a is set up in a second housing 6, and a stopper part 8b is set up in the outer circumferential part of an actuating rod 8. When suction pressure is led into a vacuum port 5 of the pressure chamber A, the stopper part 3c comes into contact with the bottom of a first housing 1 whereby the actuating rod 8 comes to move as far as a distance L1 in consequence, and when suction pressure is led into another vacuum port 10 of a pressure chamber B, both stopper parts 8b and 6b are made contact with each other, so that the actuating rod 8 comes to move as far as a distance L2 in consequence. Therefore, movements of the actuating rod 8 are controllable into three stages.
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