| 摘要 |
PURPOSE:To widen the range of X-ray energy and to miniaturize the titled apparatus, by providing a replaceable spectroscopic converging crystal and arranging a freely rotatable slit at a predetermined position. CONSTITUTION:X-rays generated from an X-ray source 1 are diffracted by a spectroscopic converging crystal 7 and condensed by a slit 3 to irradiate a specimen 15. The intensity of X-rays is measured by an incidence measuring counter 4 and the intensity of fluorescent X-rays generated from the specimen 15 is measured by a fluorescent X-rays measuring counter 16 to perform the structural analysis of the specimen 15. By replacing the spectroscopic converging crystal 7, the range of X-ray energy generated from the X-ray source 1 is widened and the analysis of various specimens such as an amorphous substance is enabled. The slit 13 is set in a freely revolvable manner through arms 20, 21 so as to hold positional relation forming a Bragg's law and the apparatus is miniaturized. Because a crystal chamber 3 and a specimen chamber are independently evacuated through valves 10, 11 by a vacuum pump 12, even the hygroscopic spectroscopic converging crystal 7 can be used. |
