| 摘要 |
PURPOSE:To easily obtain a patternwise positive type image by aggregating a specified photosensitive compds. having pyrimidine bases on both ends, and patternwise exposing said aggregated compd. with far UV rays to solubilize it. CONSTITUTION:A positive type pattern image is obtained by preparing a photosensitive compd. selected from formula I (each of R<1> and R<2> is formula II or III; each of R<3> and R<4> is H, methyl, cyano, or the like; R<5> is H, methyl, or the like; (n) is 2-6; and X is formula IV, -CH=CH-, or the like), and formula V(each of R<6> and R<7> is H, 1-4C alkyl, or the like; and each of R<6>-R<11> is H, halogen, or the like), such as formula VI or VII; coating a base with this photosensitive compd., exposing it to UV rays having >=260nm wavelengths to aggregate said compd.; hardening it; irradiating UV rays having <=260nm wavelengths through a necessary mask pattern to solubilize it; and eluting it with a solvent. |
