| 摘要 |
PURPOSE:To make installation and removal of a housing case easy and to enable automatic exchange of a substrate by providing a case and a lid which separate in the direction perpendicular to the surface of an object without mutual sliding of containers and by combining or separating the case and the lid without sliding. CONSTITUTION:A nearly U-shape frame 6 for fixing is fixed on such as the internal wall of a case. The lid 3 of a lower opening is attached to the frame 6 in free up and down motion with a belt type elastic plate 4. A housing case 2 with an upper opening is installed on the frame 6 in free removal. The elastic plate 4 is through the lid 3 and when the elastic plate 4 is transformed to downward direction in the drawing, the housing case 2 is pressed by the elastic plate 4 and a housed container V is a closed condition. When the housing case 2 is removed, if an operating rod 5 is pushed upward by such as a fork F, the elastic plate 4 is transformed upward and a substrate 1 and the housing case 2 which have been pressurized and fixed are released and the lid 3 is lifted simultaneously. Under these conditions, the substrate 1 can be taken out removing the housing case 2. |
