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发明名称
VERFAHREN ZUR THERMISCHEN BEHANDLUNG VON MIKROELEKTRONISCHEN SCHICHTSYSTEMEN
摘要
申请公布号
DD227828(A1)
申请公布日期
1985.09.25
申请号
DD19840265773
申请日期
1984.07.30
申请人
TECHNISCHE HOCHSCHULE,KARL-MARX-STADT,,,DD
发明人
LIPPMANN,HANS,DD;HAESSNER,ALFRED,DD;TEMMLER,DIETMAR,DD;WIESER,EGBERT,DD;URWANK,PETER,DD
分类号
H01L21/268;H01L21/44;(IPC1-7):H01L21/268
主分类号
H01L21/268
代理机构
代理人
主权项
地址
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