| 摘要 |
PURPOSE:To permit to produce extra high vacuum by a method wherein H2O, CO2 and the like are condensed and adsorbed by first panel, N2, O2 and Ar are condensed and adsorbed by second panel and H2, He and the like, having low condensing temperatures, are adsorbed by an adsorbent mounted on third panel. CONSTITUTION:The first panel 29 is mounted in the level of 70K, the second panel 30 is mounted in the level of 15K and the third panel 31 is mounted in the level of 4.5K in accordance with the levels of generating temperatures of small type helium refrigerators (not shown in the diagram) while the third panel 31 is mounted with the adsorbent 35. Gasses (H2O, CO2 or the like), having comparatively high condensing temperature, is condensed and adsorbed in the first panel 29 and a baffle 36 connected thereto and gasses (N2, O2, Ar and the like), passed through the baffle 36 and having low condensing temperature, are condensed and adsorbed by the second panel 30. Further, the gasses (H2, He or the like) having further lower condensing temperatures, are adsorbed by the adsorbent 35 bonded on the surface of the third panel 31. According to this method, the thermal load of the third panel 31 is reduced, the temperature of the adsorbent 35 is kept in low and the extra high vacuum may be produced.
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