| 摘要 |
PURPOSE:To prevent the adhesion of a photo-resist, etc. on positioning stoppers constituting a semiconductor baking device and a semiconductor inspection device by annexing movable cleaning devices to the stoppers. CONSTITUTION:A wafer 2 is placed on a base plate 1 constituting a positioning device 3 while being positioned by a positioning roller 4 and positioning rollers 5 and 6 holding a driving roller 25, a fixed number of wafers 2 are forwarded, and the rollers 4, 5 and 6 are cleaned by brushes fitted to cleaning devices. The cleaning devices are each mounted on the roller 4, 5 and 6 sides, the brushes 9, 18 and 19 are fitted previously to all of them, and springs 8 and 17 and electromagnets 13 and 22 are set up. Accordingly, two pairs of the cleaning devices are mounted, the brushes 9, 18, 19 are each brought into contact with the rollers 4, 5 and 6 by using a magnetic material 14 and the electromagnets 13 and 22 against the force of the springs 8 and 17, and several roller is washed by a solvent in solvent tanks 10 and 21. |
