| 摘要 |
PURPOSE:To obtain an Ni-Fe film having small coercive force and multiplayer structure by introducing the vapor of nonmagnetic material to at least one position of an intermediate section in the direction of travelling when the Ni-Fe film is vacuum-deposited on a long-sized substrate travelling while crossing space for evaporation. CONSTITUTION:A can 10 is fitted in a vacuum tank 7 with an exhaust system 6, a high-molecular substrate 9 unrolled from an unroll roll 8 along the surface of the can is delivered in the direction of the arrow 19, and wound by a wind-up roll 16 after the substrate is delivered by approximately one round. In the constitution, the base side of the can 10 is covered with a mask 11 with an opening section, and an Mg evaporating source 15 and an Ni-Fe evaporating source 14 are disposed made to correspond to the opening section. The evaporating sources 14 and 15 are irradiated alternately by electron beams 13 from an electron gun 12 penetrated through the wall of the vacuum tank 7, and an Ni-Fe film holding an Mg film is applied on the surface of the substrate 9 exposed in the opening section. Accordingly, the Ni-Fe film having small coercive force is obtained efficiently, and fitted to a magnetic record medium, etc.
|
