| 摘要 |
PURPOSE:To obtain a two-dimensional state distribution of a sample by making a two-dimensional scan on the sample surface, diffracting the spectrum of characteristic X rays from the sample into a long-wavelength and a short-wavelength region, and calculating the quantity of a peak shift or asymmetry from obtained detection signals. CONSTITUTION:A deflector 9 scans an electron beam 7 on the surface of the sample 9. Characteristic X rays 11 radiated from the sample 9 are diffracted spectrally by a photospectroscope 10 and detected by an X-ray detector 13 through a slit 12. The detector 13 is equipped with a semiconductor plate 15 and used while a voltage is applied between electrodes 16 and 17 split in the center and an electrode 18 on the other surface. The electrode 16 is set as the long- wavelength side and the electrode 17 is set as the short-wavelength side; and output currents S1 and S2 are supplied to an arithmetic circuit. An adder 42 calculates the intensity of the X rays 11, a subtracter 43 calculates the quantity of a peak shift or asymmetry, and a divider 44 standardizes the quantity of the peak shift or asymmetry by the intensity. Thus, the two-dimensional distribution image of the sample 9 is displayed on a CRT48. |
