发明名称 |
Plane light source unit and radiant heating furnace including same |
摘要 |
Disclosed herein is a plane light source unit comprising a plurality of lamps disposed closely with each other in proximity to a mirror with the longitudinal axes of the lamps extending parallelly in a plane. Each of the lamps comprises an elongated sealed tubular body and a filament formed of alternating non-luminous portions and luminous portions and provided within the tubular body along the longitudinal axis of the tubular body. A radiant heating furnace comprising the above plane light source unit and a cooling system therefor is also disclosed. The plane light source unit and a radiant heating furnace incorporating the same light source unit can irradiate light onto a region of a large area with a uniform irradiation energy density. They are suitable for heat treatment of semiconductor wafers.
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申请公布号 |
US4543472(A) |
申请公布日期 |
1985.09.24 |
申请号 |
US19820438790 |
申请日期 |
1982.11.03 |
申请人 |
USHIO DENKI KABUSHIKI KAISHA |
发明人 |
ARAI, TETSUJI;IGARASHI, TATSUSHI |
分类号 |
F27B17/00;H05B3/00;(IPC1-7):H05B1/00;F27D11/00 |
主分类号 |
F27B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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