| 摘要 |
PURPOSE:To obtain the diaphragm made of a single material or >=2 kinds of composite material by forming a vapor-deposited layer of the single material or >=2 kinds of composite material and then separating the vapor-deposited layer and base from each other. CONSTITUTION:The diaphragm base 1 is arranged on a base holder 2a in a vacuum container 2, which is evacuated by a vacuum pump to about 10<-2>- 10<-4>Torr. The base 1 is heated by a heater 2b to 350-400 deg.C and, for example, gaseous titanium tetrachloride and argon gas as carrier gas and methane and hydrogen as reaction gas into the container 2. The total gas pressure in the container 2 is held at 0.5-1Torr and high frequency electric power is impressed between the holder 2a and a plate 2c to cause glow discharge over the base 1, forming the silicon nitride vapor-deposited layer on the base 1. Then the vapor- deposited layer and base 1 are separated from each other to obtain the diaphragm made of only silicon nitride. |
