| 摘要 |
PURPOSE:To attain a stable white background without influences upon a heating electrode by not making the heating electrode white but forming a white insulating layer on the upper face of a heating electrode layer. CONSTITUTION:A heat insulating and electric insulating layer 2 is formed on a lower glass substrate 1. A photomask is put on an Al film to be an electrode, and this film is exposed and developed, and thereafter, an electrode pattern of a heating electrode 3 is formed by etching or the like. The white insulating layer is formed by sputtering or the like, and the mixture rate of impurity gas out of sputtering conditions is dominant when an SiO2 insulating layer is made white. If the mixture rate of impurity gas is raised, the insulating layer becomes cloudy to be made opaque, and therefore, the reflection factor of the specular surface is reduced, and a white insulating film 7 is obtained. |
