| 摘要 |
PURPOSE:To reduce more quantity of radiating heat which reaches a substrate from a crucible, by housing the crucible in a heat insulating vessel. CONSTITUTION:A crucible 1 and a filament 5 are housed in a heat insulating vessel consisting of heat-resisting material. An opening 22 which is bored through a portion of the heat insulating vessel 21 opposing to an injecting hole 3 is, for example, a coniform trapezoid shape. At the side confronting the crucible 1 the opening is the same diameter as the injecting hole 3, and the further in the direction of the opposit side, the larger the opening diameter. In this way, since the opening 22 area of te adiabatic vessel 21 is small, metal vapor jetting from the injecting hole 3 passes through the opening 22, but radiating heat generating from the crucible 1 is almost intercepted by the heat insulating vessel 21. Therefore, the heat reaching to the substrate 13 is very small and a particular device such as a substrate cooler is not required. |
