METHOD AND DEVICE FOR THE DIRECT CONTINUOUS ANALYSIS OF TRACES OF GASEOUS HYDRIDES

摘要

1. Method for the direct and continuous analysis of traces of gaseous hydrides selected from the group of arsine, phosphine, silane and diborane solely or in a mixture having very low contents in a carrier gas by chemiluminiscence emission of the said hydrides in presence of ozone, characterised in that the emitted spectra are optically filtered so that by optical filtration the signals of wave lengths between 495 and 650 nm are transmitted and that the transmitted optical signals are amplified by a photomultiplier tube the spectral response curve of which is adapted to the cited zone of wave lengths.