发明名称 THIN FILM DIODE
摘要 PURPOSE:To enable utilization as a switching element of memorizing property by a method wherein a Schottky barrier is formed on at least one interface of a semiconductor thin film of transition metal oxide sandwiched between two electrodes. CONSTITUTION:Ti is evaporated on a glass substrate 1 as the lower side electrode 6, and WOx (x<=3) is formed as the semiconductor thin film 7 of transition metal oxide. Further, the upper electrode 8 is formed by forming Ir on the film 7. This film 7 of WOx or the like is of N type semiconductor substance: if an electrode 8 of larger work function is selected, the junction surface shows the rectifying characteristic. Aging whereby triangular wave voltage is impressed at several times across the electrodes 6, 7 of a thin film diode 5 thus constructed can yield the thin film diode having the hysteresis characteristic. Then, the switching element having the memory function can be obtained by using this diode 5 for the switching means.
申请公布号 JPS60182762(A) 申请公布日期 1985.09.18
申请号 JP19840037916 申请日期 1984.02.29
申请人 FUJITSU KK 发明人 YOSHIMURA TETSUZOU;WATANABE MASANORI
分类号 H01L29/872;H01L27/10;H01L27/102;H01L29/47;H01L29/861 主分类号 H01L29/872
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