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发明名称
ARC EVAPORATING LARGE AREA TARGETS
摘要
申请公布号
GB8520079(D0)
申请公布日期
1985.09.18
申请号
GB19850020079
申请日期
1985.08.09
申请人
VAC-TEC SYSTEMS INC
发明人
分类号
C23C14/24;C23C14/32;H01J37/32;H05H1/50
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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