| 摘要 |
PURPOSE:To automatically detect an abnormal bonding when the abnormality is generated by a method wherein the output signal of an ultrasonic oscillator is detected on every bonding operation, a decision whether or not the detected level is within the prescribed tolerance limits set in advance is given. CONSTITUTION:The output signal of an ultrasonic oscillator 4 is sampled every time when a bonding operation is performed and analog-digital converted data are inputted to a central arithmetic operational device 23. Said data are comparatively determined whether or not they are within the range of data corresponding to the normal condition of the bonding memorized in a memory storage 24. When a decision for generation of an abnormal bonding is given, the identification data of the bonding chip, a pad part and the like at this time are memorized in the memory storage, the number of abnormality detection is counted up, and an abnormal alarm output is generated. Said abnormal alarm output is received by an alarm generator 30, and an alarm indication and alarm signal are outputted. |
