| 摘要 |
PURPOSE:To prevent the quality of a film from deteriorating by employing a light source which can obtain a short wavelength light of high intensity and uniform emitting intensity on a large area, thereby eliminating a public pollution and a problem of a danger. CONSTITUTION:A photoexcitation reactor is formed of a reaction chamber 1 and a light source for receiving a light energy in the chamber 1. In this case, a discharge vessel 7 which has a cathode 8 for emitting electrons and an anode 9 for forming an electric field to the cathode 8 is provided as a light source. A coil 10 is provided as means for generating a magnetic field at the outer periphery of the vessel 7. Then, since the electrons in the vessel 7 are spirally moved by the operations of the electric and magnetic fields, the discharge gas pressure drops. Accordingly, a light having a short wavelength as compared with the light source by the discharge lamp can be obtained, and the large area substrate can be treated with high uniformity. Thus, the quality of the film can be prevented from deteriorating. |
