| 摘要 |
PURPOSE:To enable a highly accurate measurement by detecting the angle of inclination of an arm with a deviation dimension detector when a stylus abuts on a deviation dimension inspecting surface with the known deviation dimension from the reference line to confirm the accurate position of the stylus tip. CONSTITUTION:The movement of an arm support body 21 in the direction X as connected to a nut 19 is detected with an X-direction detector 18. An arm 1 having a stylus 2 mounted at the tip thereof is supported rotatably on the support body 21 and the displacement of the stylus 2 tip in the direction Y is detected with Y-direction detector 22. In addition, a deviation dimension reference body 23 having a deviation dimension inspecting surface 24 is mounted detachably, where the deviation dimension H from the reference line T is known. Then, the angle of inclination of the arm 1 when the tip of the stylus 2 abuts the inspecting surface 24 is detected with the detector 22 serving as a deviation dimension detector whereby a fine deviation DELTAH is determined from the deviation demension H. The angle of inclination of the arm 1 when the stylus 2 moves abutting on the surface of an object 26 to be measured is also detected with the detector 22. Based on these detection values, a circular arc error is corrected. |
