发明名称 METHOD OF AND APPARATUS FOR THE VAPOR DEPOSITION OF MATERIAL UPON A SUBSTRATE
摘要 <p>A method of and apparatus for depositing material upon a surface, e.g. to coat the surface or to form compounds containing this material by bonding with the substrate material of the surface, in which an arc is struck between at least one solid electrode and a pool of molten metal to vaporize the molten metal and permit transfer of the metal vapors to the substrate.</p>
申请公布号 CA1193494(A) 申请公布日期 1985.09.17
申请号 CA19820396498 申请日期 1982.02.17
申请人 WEDTECH CORP. 发明人 PINKHASOV, EDUARD
分类号 C23C14/14;C23C14/24;C23C14/32;H01J37/32;H01L21/203;H01L21/285;H05K1/03;H05K3/38;(IPC1-7):C23C14/24;B05B1/24 主分类号 C23C14/14
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