| 摘要 |
<p>PURPOSE:To obtain a small-sized vacuum pump having high-performance which can be operated as two-stage pump by allowing each independent suction port to communicate to each capacity increasing chamber of the first and the second pump chambers and allowing each independent exhaust port to communicate to the capacity reducing chambers of the first and the second pump chambers. CONSTITUTION:In the captioned vacuum pump, the inside and outside pump chambers I and II are provided with suction and exhaust functions individually in essence, and the pumps I and II are equipped with independent suction ports S I and SII and exhaust ports P I and PII which are independent and communicate to the capacity reducing chambers I a and IIa and capacity increasing chambers I b and IIb. Therefore, if separate exhaust passages are connected to the suction and exhaust ports of the pumps I and II, said exhaust passages can be used for two separated pumps which operate at the same time. With such constitution, the captioned compact vacuum pump can be operated as a two- stage pump with which high vacuum can be obtained.</p> |
