| 摘要 |
<p>PURPOSE:To obtain a compact vacuum pump having a large capacity by allowing the first and the second pump chambers formed inside and outside an inner cylinder to separately perform suction and exhaust operations by the movement in one cycle of a single turning vane and allowing each capacity to be added. CONSTITUTION:A suction port S always communicates to the capacity increasing chamber IIb of the second pump chamber II, and allows the capacity increasing chamber IIa to communicate to the capacity increasing chamber I b of the first pump chamber I , and the capacity reducing chamber IIa of the second pump chamber II communicates to the capacity reducing chamber I a of the first pump chamber I through a valve 10 which is opened in a prescribed timing at the position close to the turning side of a vane 6. Further, the above- described capacity reducing chamber I a communicates to an exhaust port P through a check valve 11. With such constitution, the first and the second pump chambers I and II formed inside and outside an inner cylinder 4 separately perform suction and exhaust operations in the movement in one cycle of a single turning vane 6, and each capacity is added, and the function equal to that of a two-stage pump is developed, and high compression ratio can be obtained, and high vacuum can be achieved, and a compact vacuum pump having a high capacity can be obtained.</p> |
