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发明名称
ANORDNING VED FORSTOEVNINGSKATODE OG SYSTEM FOR PAAFOERING AV BELEGG PAA STORE SUBSTRATAREALER
摘要
申请公布号
NO152979(B)
申请公布日期
1985.09.16
申请号
NO19790004182
申请日期
1979.12.19
申请人
ADVANCED COATING TECHNOLOGY, INC.,
发明人
CHAMBERS, DOUGLAS L.,;WAN, CHONG T.,
分类号
C23C14/36;C23C14/35;C23C14/56;H01J37/34;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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