| 摘要 |
PURPOSE:To transfer minute patterns without heating to a high temperature or applying a high pressure, by a method wherein a thin film of an inorganic material on a base is pressed by a heated stamper provided with a rugged pattern to induce a phase transition of a crystal at parts making contact with the projected parts of the stamper, and a pattern differing in reflectance for light beams is provided. CONSTITUTION:The thin film 13 of an inorganic material (e.g., TeGeSn) is provided on the base (e.g., an acrylic plate) 10 by vacuum deposition or the like. The base 10 provided with the film 13 is fixed to a lower die 15 cooled by passing water 17 through a pipe 18, the heated stamper 1 provided with a rugged pattern is fixed to an upper die 16 with the pattern side directed downward, and pressing is conducted by the dies 16, 15 to induce a phase transition of a crystal only at the parts 21 of the thin film 13 making contact with the projected parts of the stamper 1. Accordingly, a pattern differing in reflectance for light beams is provided in correspondence with the rugged pattern of the stamper 1, thereby transferring the pattern. |
