| 摘要 |
PURPOSE:To remove excess carbon sticking to powdery AlN manufactured by the reaction of fine Al powder with fine C powder in N2 by treating the powdery AlN at a high temp. in gas contg. CO2. CONSTITUTION:Fine Al powder having 2mum average particle size is wet-mixed with carbon black having <=0.2% ash content and <=1mum average particle size in a liq. dispersion medium such as water, hydrocarbon or aliphatic alcohol in 1:0.36-1:1 weight ratio. The mixture is dried and calcined at 1,400-1,700 deg.C in an N2 or NH3 atmosphere to manufacture AlN powder. Since excess carbon sticks to AlN, the AlN powder is treated by contact with gas contg. >=0.5vol% CO2 at 700-1,100 deg.C and 0.5-5cm/sec flow rate for 30min-1hr to remove fine C particles sticking to the fine AlN particles. Thus, high purity AlN is manufactured.
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