| 摘要 |
PURPOSE:To obtain an integrated type absolute pressure type sensor, which is trimmed easily and circuit characteristics thereof are stabilized, by trimming a resistor by projecting laser beams through a window consisting of heat-resistant glass fitted to a cover such as a cap. CONSTITUTION:A monolithic type integrated type pressure sensor chip 21 is fitted to a fixed base 23, and mounted to a metallic package 25 and wire-bonded by metallic small-gage wires 27. A window 32 to which glass is bonded is fitted to a cover or a cap 30 used for hermetic seal, and the window 32 is mounted so that a transparent section thereof is superposed on an IC amplifying circuit. A space between the cap 30 and the package 25 is evacuated and hermetically sealed by a vacuum sealing device, hermetic seal is checked, and a resistor group on a semiconductor substrate is trimmed while monitoring an output by using laser beams 29 from the window 32, to which glass is fitted, of the cover or the cap 30. The resistor group can be trimmed with high accuracy because it is trimmed after all assembly work are completed. |
