| 摘要 |
PURPOSE:To improve excitation efficiency, to inhibit the dissociation of a laser medium gas in the operation of confinement and to miniaturize the device and increase an output therefrom by adding Xe as an assisting gas in an AC discharge excited gas laser in which the laser medium gas containing CO2, N2, He is used. CONSTITUTION:When an output from an AC power supply 1 of frequency (f) is applied between a pair of discharge electrodes 2, 3, discharge is generated in a discharge space 4, and the discharge excites a laser medium gas 5 encapsulated to said space 4 section. Consequently, a laser oscillator is excited between an optical resonator consisting of a total reflection mirror 6 and a partial transmission mirror 7, and one part of the oscillated beams is extracted from the partial transmission mirror 7 as laser beams. In such an AC discharge excited CO2 laser, a laser can be generated efficiently by adding Xe to the laser medium gas composed of CO2, N2, He as an assisting gas. When CO is added besides Xe, the dissociation rate of CO2 can further be reduced, but it is desirable that the molar fraction of the CO is brought to not more than one half that of CO2. |
