SPIN DEVELOPING DEVICE

摘要

PURPOSE:To form grooves of fixed depth over the entire surface of a disk of a spin developing device which forms a groove of a fixed section form to a photoresist master disk, by deciding the amount of developer to be supplied onto the disk in proportion to the distance from the disk revolving center. CONSTITUTION:A photoresist 2 is coated on a glass disk 1 which is revolved by a motor 3, and the developer is supplied onto the resist 2 from a multi-hole nozzle 17 through each hole 18. The area S of the hole 18 is proportional to the distance (r) between the revolving center of the disk 1 and the position of the hole 18. Therefore the developing power is constant regardless of the distance (r) and according to the relation between the stagnating time of the developer discharged outside on the revolving disk 1 and the amount of supplied developer. This attains the production of a master disk with high reliability.