| 摘要 |
PURPOSE:To obtain reliable measuring data and reduce a number of steps of test by testing electrical characteristics of a semiconductor apparatus to be tested under the condition that it is purged and is cooled in the dry ambient so that dewing does not occur at a temperature lower than the dewing temperature. CONSTITUTION:A predetermined number of semiconductor devices 3 are accommodated within a container 6 and the container 6, a cooling tester 7 and a sorter 9 are purged under dry air ambient at normal temperature so that dewing does not occur even under the respective dewing point. Under this condition, the cooling tester 7 is cooled up to -20--40 deg.C with a refregerator 8. Thereafter, semiconductor devices 3 are placed to a measuring head 15 with a semiconductor transfer unit 14 and herein test of electrical characteristic is carried out for semiconductor devices 10 with a semiconductor tester. Thereby, above devices are purged under the dry air ambient so that dewing does not occur even under the dewing point and these are tested under the cooled condition. Accordingly, reliable measuring data can be obtained and number of steps can be reduced. |
