| 摘要 |
PURPOSE:To simplify constitution while accelerating response, by making it possible to measure the potential of a potential surface to be measured through electrostatic capacity between a high conductor vibrated in synchronous relation to one set of piezoelectric bimorphs on a support substrate and the potential surface to be measured and using the high conductor as a detection electrode. CONSTITUTION:One end of a piezoelectric bimorph 10 is attached to a support substrate (not shown in the drawing) through a fixing material and a circuit is constituted so as to be capable of measuring the surface potential of a potential surface to be measured through electrostatic capacity between the high conductor 5 attached to the free end of said bimorph 10 and the potential surface to be measured and the high conductor 5 is arranged so as to function as a detection electrode. Then, the high conductor 5 is vibrated in synchronous relation to the bimorph 10 driven by a drive circuit (not shown in the drawing) and the electrostatic capacity value between the high conductor 5 and the potential surface to be measured is measured while cyclically varied.
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