| 摘要 |
PURPOSE:To allow the error of a bulk resistance value between the design value not to exert effects on circuit action by a method wherein the axis of symmetry of the pattern layout of a circuit is set at an orientation of <112>. CONSTITUTION:The titled device is formed in such a manner that the direction of the axis of symmetry of the pattern of a flip-flop laid out to pattern in symmetry right and left becomes coincident with the orientation of <112> in a (111) plane of Miller indices. Therefore, a pattern shift ascribing to crystal orientation generates in the direction of 90 deg. rotation. In other words, the resistance values of bulk resistors R1 and R2 both reduce on account of the pattern shift; reversely, the resistance values of bulk resistors R5 and R6 both increase; accordingly, the symmetry right and left is not damaged. On the other hand, since the axis of symmetry of the pattern of the flip-flop is in the direction of <112> with respect to bulk resistors R3 and R4, an optical shift ascribing to crystal orientation does not generate in <110> the direction orthogonal to the above-mentioned direction. Consequently, the resistance values of the bulk resistors R3 and R4 do not vary. |
