| 摘要 |
PURPOSE:To reduce the size of a high voltage power supply easily by constituting it by stacking electrets in series. CONSTITUTION:Gas introduced into a fine tube 1 through a gas hole 3 is converted into plasma by means of a high frequency waves supplied from a high frequency power supply 4. A probe 5 is inserted into the thus produced plasma and a current is fed from a D.C. power supply 9 to the probe 5. At the same time, ions 13 accelerated by high voltage produced by stacked electrets 6 and metallic plates 7 and 8 are implanted on the surface of a sample 10 attached to an electrode 11 facing the fine tube 1. Additionally, it is possible to vary the above voltage by forming each electrode between adjacent electrets 6 and bringing adjacent ones of the thus formed electrodes into contact with each other by means of another electrode. |
