OPTICAL DEFLECTING DEVICE

摘要

PURPOSE:To improve the strength and position precision of a reflecting mirror by supporting a support plate provided with a reflecting mirror surface as its top surface at apoint, and coupling displacement terminals of piezoelectric laminate bodies with the support plate at distance from fulcrums on an (x) and a (y) axis which run through the fulcrum of the support plate and cross each other at right angles in a plane. CONSTITUTION:The support plate 9 provided with the reflecting mirror surface 22 as its top surface is supported at a point with a needlelike support spring 7, and the displacement terminals of the piezoelectric elements 15a and 15b which expand and contract vertically are coupled with the support plate at positions distant from the fulcrums on the (x) and (y) axes which run through the fulcrum of the support plate and cross each other in the plane. Signal valtages applied to those piezoelectric laminate bodies 15a and 15b are varied to give different quantities of expansion and contraction or expansion and contraction timing. Those are combined properly to give the mirror 21 various tilt angles corresponding to the signal voltages, and consequently the mirror oscillates in three dimensions to deflect the reflecting surface 22 in an optional direction to incident light. Consequently, the strength of the mirror is secured sufficiently and the reflecting mirror is deflected freely with high position precision.