METHOD OF PLASMA-COATING THE INSIDE SURFACE OF A GLASS TUBE
摘要
A method of making optical fibers by plasma chemical vapor deposition (PCVD) is disclosed wherein the pressure in the glass tube is maintained constant by controlling the rate of evacuation. The pressure-dependent controlled variable is preferably the impedance of the plasma-producing device, and the rate of evacuation is controlled in such a way that this impedance remains constant.
申请公布号
EP0086378(B1)
申请公布日期
1985.09.11
申请号
EP19830100804
申请日期
1983.01.28
申请人
INTERNATIONAL STANDARD ELECTRIC CORPORATION;STANDARD ELEKTRIK LORENZ AKTIENGESELLSCHAFT;SCHOTT GLASWERKE;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLASWERKE
发明人
BEERWALD, HANS, DR.;BOHM, GUNTER, DR.;GLOMSKI, GUNTER, DR.;WITTMANN, MANFRED, DR.