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发明名称
VERFAHREN ZUR ERZEUGUNG KORNGRENZENFREIER HALBLEITERSCHICHTBEREICHE
摘要
申请公布号
DD227286(A1)
申请公布日期
1985.09.11
申请号
DD19840267590
申请日期
1984.09.25
申请人
TECHNISCHE HOCHSCHULE,KARL-MARX-STADT,,,DD
发明人
SCHARFF,WOLFRAM,DD;VOELSKOW,MATTHIAS,DD;MATTHAEI,JUERGEN,DD;WIESER,EGBERT,DD;WOLF,ANDREAS,DD
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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