| 摘要 |
PURPOSE:To reduce the size of a flow rate control device and to improve closing reliability, by a method wherein a slide valve is driven through control of an ultrasonic vibration motor in response to an output signal from a flow rate sensor. CONSTITUTION:With a set signal provided, a switching circuit 34 discriminates that it is a flow rate increasing signal, a driving circuit 35 is electrically connected to a piezoelectric body 27, and a rotor 30 rotates a rotor 24. Fluid through-holes 22a and 22b are started to communicate with each other, and fluid flows in a flow rate sensor 3 through a fluid outlet 6. The passage of the fluid rotates a vane 15, a flow rate detecting signal is fedback to a control circuit 4a, and an ultrasonic vibration motor 2a is controlled so that a flow rate is regulated to a value responding to a set signal. |
