发明名称 |
Vibration isolator for cryopump |
摘要 |
A vibration isolator is disclosed to mount a cryopump expander module or other vibrating equipment on a vacuum housing. The isolator includes a welded metal bellows which both forms a vacuum-tight passage and acts as an isolating spring, and a plurality of elastomeric isolators which clamp the oscillations of the bellows.
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申请公布号 |
US4539822(A) |
申请公布日期 |
1985.09.10 |
申请号 |
US19840584116 |
申请日期 |
1984.02.27 |
申请人 |
NATIONAL ELECTROSTATICS CORPORATION |
发明人 |
SUNDQUIST, MARK L. |
分类号 |
F16F1/32;F17C13/00;(IPC1-7):B01D8/00 |
主分类号 |
F16F1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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