| 摘要 |
PURPOSE:To automatically align a laser oscillator by detecting the displacement of a laser beam, aligning it by a motor to collect the angle. CONSTITUTION:A detecting sensor 21 for detecting the displacement of a laser beam is provided near a fully reflecting mirror 15 and a partial transmitting mirror 16. The sensor 21 is disposed in a direction perpendicular to the base 22 with 2 pairs of laser sensors (23x+) (23x-) (23y+) (23y-), and the opposed pair of the sensors are connected in series with the direction of the electromotive force reversely. One alignment controllers 32, 33 control pulse motors 36, 37 of the partial transmitting mirror side on the basis of the output voltages Vx, Vy of the sensor 21 of the fully reflecting mirror side to rotate micrometers 12x, 12y. The other alignment controllers 34, 35 control pulse motors 38, 39 of the fully reflecting mirror side on the basis of the output voltages Vx, Vy of the sensor 21 of the partially transmitting mirror side, thereby rotating the micrometers 13x, 13y. |
