发明名称 METAL MASK
摘要 PURPOSE:To combine quickly and easily a main metal mask and an auxiliary metal mask by constituting a metal mask of both masks and using said mask after sucking and uniting both metal masks through the through-holes provided to the auxiliary metal mask. CONSTITUTION:A metal mask is constituted of a main metal mask 4 and an auxiliary metal mask 1. The mask 1 is made to have a disc-shaped outside shape and is inscribed with an annular groove 3 in the circumferential edge part thereof. Through-holes 2 are punched equally to the groove 4. The mask 3 has a disc shape as well and the pattern thereof is made smaller than the pattern of the mask 1. Both masks 1, 4 are mounted to a holder 11 and are vacuum- sucked through a suction hole 9, the groove 8 and the holes 2 by which both masks are fixed in one body to a retaining frame 7 and are thus positioned. The vacuum suction is then stopped and both masks 1, 4 are placed still on a substrate 5 for vapor deposition. Both masks 1, 4 and the substrate 5 are integrally press-fitted to a receiving base 6 by tightening the screw 10 which is screwed to the frame 7.
申请公布号 JPS60174875(A) 申请公布日期 1985.09.09
申请号 JP19840022960 申请日期 1984.02.13
申请人 NIPPON DENSHIN DENWA KOSHA 发明人 FUJIWARA KOUICHI;TSURUMI SHIGEYUKI;ASAHI MASAYOSHI
分类号 C23C14/04;H01L21/285 主分类号 C23C14/04
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